EQUIPMENT

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Patterning process

  • Aligner

     Size : 4inch
     Mask patterning (1 μm resolution)                       

  • Dry Etcher

     Size: 4inch
     Pattern etching(Ar, O2, N2, CF4, SF6)

  • Laser marker

     Work area
    (300x300 mm) Marking resolution(~13 μm)

  • PR Coater

     Size: 4inch
     Auto PR coating

  • PR Developer

     Size : 4inch
     Auto PR developing

Deposition process

  • CVD

     Size : 4inch
     Nanowires Graphene Thin film

  • PLD

     Size: 4inch
     Dielectric thin films Semiconducting thin films

  • Sputter

     Work area
    (300x300 mm)
     Metals (ITO, Al, Ti, Ni) Insulators (SiO2, CeO2) Semiconductor (ZnO, WOx, In2O3)

  • Wet spinning

     Fiber synthesis
     Materials (GO, RGO,PVA, Polyurethane 등)

  • ALD

     Size : 4inch
     High-k dielectrics(Al2O3, HfO2)

  • Ultrasonic Spray System

     Size: 1inch
     Spray coating

  • Electro spinning

     Size : 4inch
     Auto PR developing

Treatment process

  • Laser Anneal

     Size : 4inch
     Pattern anneal Micro anneal (2 μm resolution)

  • Thermal Anneal

     Size: 4inch
     Device anneal

  • Asher

     Size: 4inch
     Pattern ashing

  • Ultrasonic Cleaning Bath

     Size: 2.8 L
     Substrate cleaning

  • UVO Cleaner

     Size : 4inch
     Substrates Cleaning Remove organics

  • Oven

     Size: 60 L
     PR baking (< 300 ℃)

Design and measurement process

  • IC Station

     Mentor graphics Transistor design
     Display design

  • LIV System

     Minolta CS-2000
     Spectroradiometer Keithley 2400 source Pixel type Jig

  • Contact Angle Analyzer

     Size: 2inch
     Static contact angle Dynamic contact angle

  • Alpha-Step

     Size: 4inch
     Thickness measure Roughness measure

  • Raman Spectroscopy

     Size : 2inch
     532 & 633 nm laser XY mapping available

  • Gas Chromatography

     Agilent 7890
     Gas detection: H2, O2

  • Micro PL System

     Size : 2inch
     266 & 325 nm laser XY mapping available

  • Probe Station

     B1500
     Size: 4inch IV & CV & Transistor measurement

  • Microscope

     Size: 4inch
     X 5, x 20, x 50, x 100 Bright/Dark field CCD detector

  • 4-probe sheet resistor

     Size: 4inch
     1mOhm~1MOhm 0.5% accuracy

  • Thermal Imaging Camera

     Range: -20~650 ℃
     Resolution: ±2 ℃

  • FE-SEM

     JCM-5000
     Size: 1inch
     Magnification: x10~60,000

  • Transmittance

     Size: 2inch
     Range: 200~2,000 nm

  • Filtering Measurement

     Size: 4inch
     Fine dust filtering measurement

  • Moisture analyzer

     Karl Fischer
     Range: ppm <